MEMS Materials and Processes Handbook

Ghodssi, Reza. (Author). Lin, Pinyen. (Added Author). SpringerLink (Online service) (Added Author).

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• ISBN: 9780387473185
• Physical Description: electronic
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  XXXVI, 1188p. 200 illus.. In 2 volumes, not available separately. digital.
• Publisher: Boston, MA : Springer US, 2011.

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