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E-book
Poly-SiGe for MEMS-above-CMOS Sensors
Gonzalez Ruiz, Pilar.
(
author.
).
De Meyer, Kristin.
(
author.
).
Witvrouw, Ann.
(
author.
).
SpringerLink (Online service)
(
Added Author
).
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Record details
ISBN:
9789400767997
Physical Description:
XVI, 199 p. 144 illus. online resource.
Publisher:
Dordrecht :
Springer Netherlands :
2014.
Search for related items by subject
Subject:
Physics.
Engineering.
Systems engineering.
Optical materials.
Surfaces (Physics).
Physics.
Electronic Circuits and Devices.
Circuits and Systems.
Optical and Electronic Materials.
Nanotechnology and Microengineering.
Characterization and Evaluation of Materials.
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Springer Series in Advanced Microelectronics,
1437-0387 ;
44
Springer Series in Advanced Microelectronics,
1437-0387 ;
44
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