Design for Manufacturability From 1D to 4D for 90–22 nm Technology Nodes

Balasinski, Artur. (author.). SpringerLink (Online service) (Added Author).

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• ISBN: 9781461417613
• Physical Description: electronic
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  VIII, 278 p. 214 illus., 45 illus. in color. online resource.
• Publisher: New York, NY : Springer New York : 2014.

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