Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines

Lang, Jeffrey. (editor.). SpringerLink (Online service) (Added Author).

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• ISBN: 9780387777474
• Physical Description: electronic
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  XIV, 454p. 604 illus., 302 illus. in color. online resource.
• Publisher: Boston, MA : Springer US : 2010.

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